CGEMS
Advanced CMOS-MEMS Integration for New Generation Millimeter-Scale Systems
The metal layers of the microelectronic chips are used to create microelectromechanical systems (MEMS) using completely standard CMOS processes.
Advantages
- Monolithic (miniaturized) Systems: Single chip.
- Reduced parasitics.
- Lower cost.
Coordinators:
Jordi Madrenas (jordi.madrenas(at)upc.edu)
Jordi Cosp (jordi.cosp(at)upc.edu)
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