CGEMS

Advanced CMOS-MEMS Integration for New Generation Millimeter-Scale Systems

The metal layers of the microelectronic chips are used to create microelectromechanical systems (MEMS) using completely standard CMOS processes.

Advantages

• Monolithic (miniaturized) Systems: Single chip.
• Reduced parasitics.
• Lower cost.

Coordinators:

Jordi Madrenas (jordi.madrenas(at)upc.edu)
Jordi Cosp (jordi.cosp(at)upc.edu)